full screen
Home > Technology & Engineering > Industrial chemistry & manufacturing technologies > Industrial chemistry > Chemical engineering > Chemical Vapour Deposition
Chemical Vapour Deposition

Chemical Vapour Deposition


     0     
5
4
3
2
1



Available


About the Book

Written by leading experts in the field, this book gives a comprehensive overview of the various aspects of chemical vapour deposition processes and covers the basic concepts of types of CVD processes, the design of CVD reactors, reaction and reactor modelling, and the chemistry of CVD precursors and of deposition. There are detailed descriptions of the use of many CVD techniques to deposit a wide range of materials, including semiconductors, metals, metal oxides and nitrides, optical coatings, protective coatings and functional coatings on glass. Commercial aspects of CVD are also discussed, along with possible future trends. The book is aimed at CVD practitioners such as the chemist who wishes to learn more about CVD processes, or the CVD technologist wishing to gain an increased knowledge of precursor chemistry.
About the Author: Anthony C Jones is a Professor in the Department of Chemistry in the University of Liverpool. He has over twenty five years experience in the development of precursors for use in metalorganic chemical vapour deposition (MOCVD) and atomic layer deposition (ALD), and in the chemistry of CVD processes. He has introduced a number of novel synthesis and purification routes for precursors used in the MOCVD of III-V and II-VI compound semiconductors (e.g. adduct purification), and a number of new improved precursors were developed. He was one of the founder members of Epichem Ltd. (now SAFC Hitech, Bromborough, UK) and he has published over one hundred and fifty papers in refereed journals and has filed twenty patents. His research has been recognised by the award in 1996 of the Michael A. Lunn Outstanding Contributor Award for research on precursors for indium phosphide and related compounds, as well as having numerous invitations to present his work at conferences in the UK and abroad. He is a Fellow of the Royal Society of Chemistry and Associate Scientific Editor of the Journal Chemical Vapor Deposition. Professor Jones' recent research interests include the development of precursors for the MOCVD and ALD of dielectric and ferroelectric oxide films for microelectronics applications. Michael Hitchman has been working in the area of CVD for many years, starting some 35 years ago in the RCA Laboratories in Zurich on the electrochemistry of electrochromic displays where he found alternative research interests. He turned his attention to another system involving homogeneous chemistry, heterogeneous process, and mass transport, namely, CVD, and found that rotating disks were just as useful and powerful for CVD as for electrochemistry. Since that time he has studied, and published extensively on, a wide range of CVD systems and materials. He is author of over 100 papers in refereed journals and of six patents. In 1993 the edited volume (with Klavs Jensen) on Chemical Vapor Deposition - Principles and Applications appeared and he was awarded the British Vacuum Council Medal and Prize for his work on CVD. He is a Fellow of the Royal Society of Chemistry and was elected a Fellow of the Royal Society of Edinburgh in 1995. For the last 13 years he has been Editor of the Chemical Vapor Deposition journal. Recently he has retired from university life and has founded two companies, one of which - Thin Film Innovations Ltd - is seeking to capitalize on his knowledge of materials science using CVD, electrochemistry and a variety of other deposition techniques.


Best Sellers



Product Details
  • ISBN-13: 9780854044658
  • Publisher: Royal Society of Chemistry
  • Publisher Imprint: Royal Society of Chemistry
  • Depth: 38
  • Language: English
  • Returnable: Y
  • Spine Width: 36 mm
  • Weight: 1364 gr
  • ISBN-10: 0854044655
  • Publisher Date: 22 Dec 2008
  • Binding: Hardback
  • Height: 246 mm
  • No of Pages: 582
  • Series Title: English
  • Sub Title: Precursors, Processes and Applications
  • Width: 196 mm


Add Photo
Add Photo

Customer Reviews

REVIEWS      0     
Click Here To Be The First to Review this Product
Chemical Vapour Deposition
Royal Society of Chemistry -
Chemical Vapour Deposition
Writing guidlines
We want to publish your review, so please:
  • keep your review on the product. Review's that defame author's character will be rejected.
  • Keep your review focused on the product.
  • Avoid writing about customer service. contact us instead if you have issue requiring immediate attention.
  • Refrain from mentioning competitors or the specific price you paid for the product.
  • Do not include any personally identifiable information, such as full names.

Chemical Vapour Deposition

Required fields are marked with *

Review Title*
Review
    Add Photo Add up to 6 photos
    Would you recommend this product to a friend?
    Tag this Book Read more
    Does your review contain spoilers?
    What type of reader best describes you?
    I agree to the terms & conditions
    You may receive emails regarding this submission. Any emails will include the ability to opt-out of future communications.

    CUSTOMER RATINGS AND REVIEWS AND QUESTIONS AND ANSWERS TERMS OF USE

    These Terms of Use govern your conduct associated with the Customer Ratings and Reviews and/or Questions and Answers service offered by Booksbay (the "CRR Service").


    By submitting any content to Booksbay, you guarantee that:
    • You are the sole author and owner of the intellectual property rights in the content;
    • All "moral rights" that you may have in such content have been voluntarily waived by you;
    • All content that you post is accurate;
    • You are at least 13 years old;
    • Use of the content you supply does not violate these Terms of Use and will not cause injury to any person or entity.
    You further agree that you may not submit any content:
    • That is known by you to be false, inaccurate or misleading;
    • That infringes any third party's copyright, patent, trademark, trade secret or other proprietary rights or rights of publicity or privacy;
    • That violates any law, statute, ordinance or regulation (including, but not limited to, those governing, consumer protection, unfair competition, anti-discrimination or false advertising);
    • That is, or may reasonably be considered to be, defamatory, libelous, hateful, racially or religiously biased or offensive, unlawfully threatening or unlawfully harassing to any individual, partnership or corporation;
    • For which you were compensated or granted any consideration by any unapproved third party;
    • That includes any information that references other websites, addresses, email addresses, contact information or phone numbers;
    • That contains any computer viruses, worms or other potentially damaging computer programs or files.
    You agree to indemnify and hold Booksbay (and its officers, directors, agents, subsidiaries, joint ventures, employees and third-party service providers, including but not limited to Bazaarvoice, Inc.), harmless from all claims, demands, and damages (actual and consequential) of every kind and nature, known and unknown including reasonable attorneys' fees, arising out of a breach of your representations and warranties set forth above, or your violation of any law or the rights of a third party.


    For any content that you submit, you grant Booksbay a perpetual, irrevocable, royalty-free, transferable right and license to use, copy, modify, delete in its entirety, adapt, publish, translate, create derivative works from and/or sell, transfer, and/or distribute such content and/or incorporate such content into any form, medium or technology throughout the world without compensation to you. Additionally,  Booksbay may transfer or share any personal information that you submit with its third-party service providers, including but not limited to Bazaarvoice, Inc. in accordance with  Privacy Policy


    All content that you submit may be used at Booksbay's sole discretion. Booksbay reserves the right to change, condense, withhold publication, remove or delete any content on Booksbay's website that Booksbay deems, in its sole discretion, to violate the content guidelines or any other provision of these Terms of Use.  Booksbay does not guarantee that you will have any recourse through Booksbay to edit or delete any content you have submitted. Ratings and written comments are generally posted within two to four business days. However, Booksbay reserves the right to remove or to refuse to post any submission to the extent authorized by law. You acknowledge that you, not Booksbay, are responsible for the contents of your submission. None of the content that you submit shall be subject to any obligation of confidence on the part of Booksbay, its agents, subsidiaries, affiliates, partners or third party service providers (including but not limited to Bazaarvoice, Inc.)and their respective directors, officers and employees.

    Accept

    New Arrivals



    Inspired by your browsing history


    Your review has been submitted!

    You've already reviewed this product!